ASTM E684-2004 固体表面溅射深度仿形加工用大直径离子束的电流密度近似测定的标准规程

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【英文标准名称】:StandardPracticeforApproximateDeterminationofCurrentDensityofLarge-DiameterIonBeamsforSputterDepthProfilingofSolidSurfaces
【原文标准名称】:固体表面溅射深度仿形加工用大直径离子束的电流密度近似测定的标准规程
【标准号】:ASTME684-2004
【标准状态】:现行
【国别】:
【发布日期】:2004
【实施或试行日期】:
【发布单位】:美国材料与试验协会(US-ASTM)
【起草单位】:E42.08
【标准类型】:(Practice)
【标准水平】:()
【中文主题词】:表面;分析;精整;原子吸收分光光度测定法;电流密度;离子束;金属;试验;直径
【英文主题词】:ionbeamsputtering
【摘要】:SputterdepthprofilingisusedinconjunctionwithAugerelectronspectroscopy,x-rayphotoelectronspectroscopy,ionscatteringspectroscopy,andsecondaryionmassspectrometrytodeterminethechemicalcompositionandatomicconcentrationasafunctionofdistancefromthesurfaceofaspecimen.SeeGuideE1127.Thediameteroftheionbeamusedforsputteringmustbespecifiedandthispracticeisarelativelyquickmethodofmeasuringtheshape(thatis,currentdensitydistribution)oftheionbeamifasuitableFaradaycupisnotavailable.31.1Thispracticedescribesasimpleandapproximatemethodfordeterminingtheshapeandcurrentdensityofionbeams.Thepracticeislimitedtoionbeamsofdiametergreaterthan0.5mmofthetypeusedforsputteringofsolidsurfacestoobtainsputterdepthprofiles.Itisassumedthattheion-beamcurrentdensityissymmetricalaboutthebeamaxis.1.2Thisstandarddoesnotpurporttoaddressallofthesafetyconcerns,ifany,associatedwithitsuse.Itistheresponsibilityoftheuserofthisstandardtoestablishappropriatesafetyandhealthpracticesanddeterminetheapplicabilityofregulatorylimitationspriortouse.
【中国标准分类号】:A55
【国际标准分类号】:17_220_20
【页数】:2P.;A4
【正文语种】: